Introduction of new Pura Plus is Michell latest requirements for wafer industry equipment size and indicators specifically designed for change. Pura Plus is an online transaction trace humidity transmitters, multiple installation leads to the production line at the end of the semiconductor factory gas supply, to monitor the application of ultra-pure inert gas. Gas distribution systems within the plant complex, involving many branches, nodes, and point of use. Therefore, after a conventional moisture monitoring point, due to a small amount of leakage, inefficient system design, component failure or process error and so cause the ingress of moisture, affect downstream use. Installed in the distribution system Pura Plus provides fast response indicates, at 20 ppb moisture level transaction response time of less than 1 ppb for 1 minute. Highlights of the new concept ppb level moisture movement in fast response and low humidity ppb level sensitivity (<1 ppb) multi-point measurement installation of low-maintenance type of status indicator lights can be set to warning and alarm Modbus network compatible remote control interface, multi-channel software Response time humidity range variation pipeline detection technology (UHP) ultra-pure gases index response rate <1 minute 20 ppb 1 ppb moisture of 1 ppb to 20,000 ppm pressure range 0 to 10 bar pressure rating 300 bar Leak Test 0-9 mbar l / s Working flow range 1 ~ 10 l / min Operating temperature 5 ~ 40 ° C Storage Temperature 30 ~ 70 ° C 20 ~ 28 V DC power supply 5 W maximum power level of an external fuse 500 mA fast-acting two Modbus ASCII data output wire RS485 warning and alarm output 2 Maximum voltage 40 V DC Maximum current 100 mA gas contacting material shell material stainless steel AISI 316L, electro-polished inner surface <10 Ra alumina electrolyte sensor structure, the upper gold-plated protection, the lower layer of aluminum interior volume 4.4 cm3 Weight 450g Gas Connections 1/4 "m VCR electrical interface 9 - pin D - type m Interface EMC EN50081-2 and EN50082-2